[J.17] Critical Dimension and Pattern Size Enhancement Using Pre-Strained Lithography [J.16] Enlarging a Post-Lithography Pattern Modification Process Window with a Poisson’s Ratio-Matching Inter-Layer [J.15] Thermoresistive Strain Sensor and Positioning Method for Roll-to-Roll Processes [J.14] Friction-Assisted Pulling Force Detection Mechanism for Tactile Sensors [J.12] Mutual Capacitive Flexible Tactile Sensor for 3-D Image Control [J.11] Post-Lithography Pattern Modification and Its Applicationto a Tunable Wire Grid Polarizer « 1 2 3 4
