[J.43] Machine learning-based off-line electrical characteristic prediction through in-line pattern integrity inspection
Ting-Jeng Liu, Meng-Jhu Wu, and Cheng-Yao Lo
Journal of Micromechanics and Microengineering, Vol. 31, 015005 (2021)
[J.43] Machine learning-based off-line electrical characteristic prediction through in-line pattern integrity inspection