Research / Device Development 元件開發

[J.26] Doubling the Spatial Resolution in Capacitive Tactile Sensors

Mochtar Chandra, Shi-Yu Ke, Rongshun Chen, and Cheng-Yao Lo
Journal of Micro/Nanolithogrpahy, MEMS, and MOEMS, Vol. 16, 035001 (2017)

doi:10.1117/1.JMM.16.3.035001