Thanks to the shared facilities from other groups or NTHU, most of our research works were done nearby. Shared tools are with *.
這些共用(以*號表示)或專有設備協助我們完成大部分的研究工作。
For document password, please contact lab members.

RF, Ulvac, RFS-200S*

Cello, Ohmiker-50b*

Ulvac, TBD*

Nanonex, NX2000*

Bruker, Dektak XT*

Wyko, Veeco, Wyko NT1100*

  • Wyko SOP

Bruker, Dimension ICON*

NT-MDT, Solver P47*

FEI, Versa 3D*

Jasco, V-670*

  • Photometer SOP

Agilent, 34410A

Customized system

Yotec, SH-5

Swienco MP490*

  • Spinner SOP

Top tech, TR15*

  • Spinner SOP

Single-side, Customized system*

  • SAligner SOP

Double-side, Electronic Visions, EV620*

  • DAligner SOP

Elionix, ELS-7500EX*

Customized system*

  • PME E-beam writer SOP