[J.55] Novel Multiaxial Force Decoupling Strategy in Vertically Stacked Force Sensors with Hybrid Fabrication Techniques

[J.55] Novel Multiaxial Force Decoupling Strategy in Vertically Stacked Force Sensors with Hybrid Fabrication Techniques

Jie-Ying Wu, Tzu-Yi Hsu, Gufran Ahmad, Sandipan Mallik, and Cheng-Yao Lo
IEEE Sensors Journal, Vol. 23, 30135-30142 (2023)

10.1109/JSEN.2023.3326310